Select the cell and highlight the specific character(s) you want to format
Press Ctrl+1 to open Format Cells
Go to the Font tab
Check Superscript
Click OK
Use the formula bar to edit only part of the text if needed
For numbers or symbols, use Insert > Symbol and choose a superscript character
On Mac, press Command+1 to open Format Cells
Use Unicode superscript characters when applicable
Use the CHAR function only for supported superscript symbols
Use Alt codes on Windows for available superscript characters