Select the cell or text in the formula bar
Highlight the specific character you want to make superscript
Press Ctrl+1 to open Format Cells
Go to the Font tab
Check Superscript
Click OK
For partial text in a cell, edit the cell first, then select only the characters you want to format
On Mac, press Command+1 to open Format Cells
Use the same Font tab and select Superscript
If Superscript is unavailable, use the character map or insert a Unicode superscript character
For charts or text boxes, select the text, then apply Superscript from the font settings